polydepletionmetalgate

This effect is called polysilicon depletion. It leads to a reduced electron concentration at the interface and causes an effective increase of the dielectric ...

2019年6月15日 — （2um以前的时代都是Metal Gate，1.5um以下的时代都是Poly Gate了)。 ... 再回来讨论Poly gate吧，刚刚讲的如果直接在poly gate ... Poly Depletion Effect)。

由 YC Yeo 著作 · 2004 · 被引用 109 次 — In scaling the transistor gate length LG below 50 nm, problems related to poly-silicon (poly-Si) gate depletion and high gate resistance become very significant ...

串接了一個Poly Depletion電容，使得等. 效閘極電容變 ... Dual gate structure(metal-N, metal+poly-P) ... 2001/10/9 Chartered Gate Structure/Process Dummy SiN gate/high ...

Degradation of MOS gate capacitance in the inversion region becomes worse as the gate length is scaled down, according to a new experiment.

2023年6月11日 — Why PolySi to HKMG. High-K Metal Gate; 隨元件/製程微縮，接近導體的PolySilicon (N+/P+ Poly-Si)問題越明顯。因為本質是半導體，在小尺寸下，閘極 ...

1) Polysilicon depletion lowers the gate cap and increases the effective electrical thickness of the gate insulator. 2) Quantum confinement increases V. T. 3) ...

A heavily doped film of polycrystalline silicon (poly-Si) is typically employed as the gate-electrode material in modern MOS devices. – There are practical ...

Polysilicon depletion effect is the phenomenon in which unwanted variation of threshold voltage of the MOSFET devices using polysilicon as gate material is ...